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Development of a high-Density, Planar, Modular Micro fluidic Interconnection System

Development of a high-Density, Planar, Modular Micro fluidic Interconnection SystemDeveloped a modular system using sift, precision molded gaskets to seal mating microfluidic ports on various micromachining components based upon the applications of conventional gasket sealing principles. The work was able to miniaturize bulk micromachined geometries in silicon.

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